波蘭 PREVAC Effusion cell EF 40C1 蒸發(fā)源EF 40C1

EF 40C1蒸發(fā)源(Knudsen池)是一種設(shè)計(jì)用于間接電阻加熱并提供高度恒定蒸發(fā)速率的源。定制插入長(zhǎng)度114-380毫米(根據(jù)要求提供其他長(zhǎng)度)。

特性

極其穩(wěn)定的通量率
各種坩堝材料
高度可重復(fù)性和可靠性
適用于任何MBE系統(tǒng)
無(wú)鉬結(jié)構(gòu)(允許高放氣溫度)
整體水冷

選項(xiàng)

定制插入長(zhǎng)度
有或沒(méi)有集成手動(dòng)/電動(dòng)氣動(dòng)快門(mén)
線性移位
坩堝
C或K型熱電偶

技術(shù)參數(shù)

Mounting flangeDN 40CF (rotatable)
HeaterW wire (tungsten)
Temperature rangeEF 1500 °C? (~250 °C – 1500 °C, 1600 °C for degas)
EF 1200 °C? (~250 °C – 1200 °C)
Temperature stability± 0.1°C
Crucible type (option)PBN, Al2O3, Quartz (other materials on request)
Crucibles volume5cc
Evaporated materialsAll typical materials according to?crucible type
Thermocouple typeEF 1500 °C? – type C (standard)
EF 1200 °C? – type K (option)
Degassing temp.1600 °C
Type of shutterside or flip type, manual or pneumatic
Water cooling (required)water flow: > 0.5 l/min, temperature: 20 – 30 °C, max pressure: 6 bar
Insertion lengthmin. 114mm (other on request) OD: 35 mm
Spot sizeDependent on working distance
Working distance100 – 150 mm
Bakeout temperatureup to?250 °C
Working pressure< 10-5?mbar

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