{"id":245,"date":"2025-07-04T12:18:43","date_gmt":"2025-07-04T04:18:43","guid":{"rendered":"https:\/\/www.bihec.com\/polygonphysics\/?p=245"},"modified":"2025-07-04T12:18:43","modified_gmt":"2025-07-04T04:18:43","slug":"polygon-physics-multi-beam-sputter-deposition-systems-%e5%a4%9a%e6%9d%9f%e6%ba%85%e5%b0%84%e6%b2%89%e7%a7%af%e7%b3%bb%e7%bb%9f","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/polygonphysics\/polygon-physics-multi-beam-sputter-deposition-systems-%e5%a4%9a%e6%9d%9f%e6%ba%85%e5%b0%84%e6%b2%89%e7%a7%af%e7%b3%bb%e7%bb%9f\/","title":{"rendered":"Polygon Physics Multi Beam Sputter Deposition Systems \u591a\u675f\u6e85\u5c04\u6c89\u79ef\u7cfb\u7edf"},"content":{"rendered":"<p>\u6211\u4eec\u9488\u5bf9\u591a\u7ec4\u5206\u6750\u6599\u7814\u7a76\u4e2d\u5bf9\u66f4\u9ad8\u901a\u91cf\u9700\u6c42\u7684\u89e3\u51b3\u65b9\u6848\uff1a\u591a\u675f\u6e85\u5c04\u6c89\u79ef\u3002<\/p>\n<p>\u8fd9\u662f\u4e00\u79cd\u57fa\u4e8e\u79bb\u5b50\u675f\u6e85\u5c04\u7684\u72ec\u7279\u8584\u819c\u6c89\u79ef\u51e0\u4f55\u7ed3\u6784\uff0c\u901a\u8fc7\u6211\u4eec\u8d85\u7d27\u51d1\u4e14\u8d85\u4f4e\u529f\u8017\u7684\u7535\u5b50\u56de\u65cb\u5171\u632f\uff08ECR\uff09\u6280\u672f\u4ea7\u751f\u591a\u675f\u79bb\u5b50\u675f\u3002\u4e00\u4e2a\u5173\u952e\u7279\u6027\u662f\uff0c\u4f7f\u7528\u975e\u5e38\u7d27\u51d1\u7684\u6e85\u5c04\u9776\u6750\uff0c\u80fd\u591f\u5728\u56fa\u5b9a\u7684\u57fa\u5e95\u4e0a\u5b9e\u73b0\u6210\u5206\u548c\u539a\u5ea6\u7684\u5747\u5300\u6c89\u79ef\uff0c\u6216\u8005\u8fdb\u884c\u53ef\u63a7\u68af\u5ea6\u7684\u6c89\u79ef\u3002\u8fd9\u4e00\u5207\u90fd\u96c6\u6210\u5728\u4e00\u4e2a\u9ad8\u5ea6\u81ea\u52a8\u5316\u4e14\u5360\u5730\u9762\u79ef\u6781\u5c0f\u7684\u7cfb\u7edf\u4e2d\u3002<\/p>\n<p>&nbsp;<\/p>\n<p id=\"JFRNsji\"><img decoding=\"async\" loading=\"lazy\" class=\"alignnone  wp-image-246 \" src=\"https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_686754c7c6f9e.png\" alt=\"\" width=\"550\" height=\"467\" srcset=\"https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_686754c7c6f9e.png 966w, https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_686754c7c6f9e-300x255.png 300w, https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_686754c7c6f9e-768x652.png 768w, https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_686754c7c6f9e-500x424.png 500w, https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_686754c7c6f9e-800x679.png 800w\" sizes=\"(max-width: 550px) 100vw, 550px\" \/><\/p>\n<p>\u79bb\u5b50\u675f\u6c89\u79ef 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target=\"_blank\">\u79bb\u5b50\u6e90<\/a>\u7c7b\u578b\u4ee5\u53ca\u4fbf\u6377\u7684\u7528\u6237\u754c\u9762<br class=\"container-OHFynm wrapper-enlgKp undefined\" \/>\u4f4e\u7cfb\u7edf\u7ef4\u62a4\uff1a\u91c7\u7528\u4e13\u5229\u8bbe\u8ba1\uff0c\u4fdd\u62a4\u79bb\u5b50\u6e90\u548c\u53cd\u5e94\u8154\u514d\u53d7\u6c89\u79ef\u5f71\u54cd<\/p>\n<p>&nbsp;<\/p>\n<p>\u52a8\u4e00\u4e2a\u5de5\u827a\uff0c\u8be5\u7cfb\u7edf\u80fd\u591f\u57fa\u4e8e\u591a\u8fbe 24 \u4e2a\uff08\u53d6\u51b3\u4e8e\u6e90\u7684\u6570\u91cf\uff09\u72ec\u7acb\u9776\u6750\u6c89\u79ef\u51e0\u4e4e\u4efb\u4f55\u56fa\u4f53\u9776\u6750\u6750\u6599\u7684\u8584\u819c\u3002\u4f8b\u5982\uff0c\u9664\u4e86\u7528\u4e8e\u6e90\u64cd\u4f5c\u7684\u60f0\u6027\u6c14\u4f53\u4e4b\u5916\uff0c\u8fd8\u53ef\u4ee5\u901a\u8fc7\u5728\u6837\u54c1\u9644\u8fd1\u4f7f\u7528\u7b2c\u4e8c\u79cd\u6c14\u4f53\u6765\u8fdb\u884c\u6c2e\u5316\u7269\u6216\u6c27\u5316\u7269\u8584\u819c\u7684\u53cd\u5e94\u6027\u6c89\u79ef\u3002<\/p>\n<p>\u6211\u4eec\u7684\u65b9\u6cd5\u4e0e\u4f20\u7edf<a href=\"https:\/\/www.bihec.com\/polygonphysics\/tag\/%e7%a6%bb%e5%ad%90%e6%9d%9f%e6%ba%85%e5%b0%84%e6%b2%89%e7%a7%af\/\" title=\"View all posts in \u79bb\u5b50\u675f\u6e85\u5c04\u6c89\u79ef\" target=\"_blank\">\u79bb\u5b50\u675f\u6e85\u5c04\u6c89\u79ef<\/a>\u65b9\u6cd5\u4e00\u6837 \u201c\u5bf9\u6837\u54c1\u53cb\u597d\u201d\uff1a\u886c\u5e95\u53ef\u4ee5\u662f\u654f\u611f\u6750\u6599\uff0c\u56e0\u4e3a\u5b83\u4eec\u4e0d\u4f1a\u53d7\u5230\u7b49\u79bb\u5b50\u4f53\u7684\u4fb5\u8680\uff08\u7b49\u79bb\u5b50\u4f53\u88ab\u9650\u5236\u5728\u6e90\u8154\u4e2d\uff09\uff0c\u65e0\u9700\u5bf9\u6837\u54c1\u8fdb\u884c\u504f\u538b\uff0c\u5e76\u4e14\u6837\u54c1\u52a0\u70ed\u6781\u5c0f\u3002<\/p>\n<p>\u6211\u4eec\u7684\u7cfb\u7edf\u6240\u5236\u5907\u7684\u8584\u819c\u8d28\u91cf\u662f\u79bb\u5b50\u675f\u6e85\u5c04\u6c89\u79ef\u7684\u5178\u578b\u8d28\u91cf\u3002\u8584\u819c\u81f4\u5bc6\u4e14\u5149\u6ed1\uff0c\u901a\u5e38\u4e3a\u7eb3\u7c73\u6676\u6027\u8d28\uff0c\u5e76\u4e14\u4e0d\u542b\u6709\uff08\u6765\u81ea\u6e90\u7684\uff09\u60f0\u6027\u6c14\u4f53\u3002\u6211\u4eec\u7cfb\u7edf\u7684\u975e\u6807\u51c6\u51e0\u4f55\u7ed3\u6784\u80fd\u591f\u5b9e\u73b0\u534a\u5171\u5f62\u6c89\u79ef\u3002<\/p>\n<p>\u591a\u79cd\u7c7b\u578b\u7684\u591a\u7ec4\u5206\u8584\u819c<\/p>\n<p>\u6211\u4eec\u6c89\u79ef\u7cfb\u7edf\u6240\u91c7\u7528\u7684\u6e90\u6280\u672f\u4e3a\u591a\u7ec4\u5206\u8584\u819c\u7684\u5236\u5907\u63d0\u4f9b\u4e86\u5de8\u5927\u7684\u53ef\u80fd\u6027\u3002<\/p>\n<p>\u9996\u5148\uff0c\u8fd9\u662f\u56e0\u4e3a\u6211\u4eec\u7684\u7535\u5b50\u56de\u65cb\u5171\u632f\uff08ECR\uff09\u79bb\u5b50\u6e90\u5728\u675f\u6d41\u548c\u80fd\u91cf\u65b9\u9762\u90fd\u6709\u8f83\u5927\u7684\u64cd\u4f5c\u7a97\u53e3\u3002\u5176\u6b21\uff0c\u6bcf\u4e2a\u79bb\u5b50\u6e90\u90fd\u901a\u8fc7\u72ec\u7acb\u7684\u5c04\u9891\u7535\u6e90\u8fdb\u884c\u5355\u72ec\u63a7\u5236\u3002\u6700\u540e\uff0c\u8fd9\u4e9b\u79bb\u5b50\u6e90\u6613\u4e8e\u5355\u72ec\u5f00\u542f\u548c\u5173\u95ed\u3002\u8fd9\u4e0d\u4ec5\u80fd\u591f\u5b9e\u73b0\u591a\u7ec4\u5206\u6750\u6599\u7684\u5747\u5300\u6c89\u79ef\uff0c\u8fd8\u80fd\u5bf9\u975e\u5747\u5300\u591a\u7ec4\u5206\u6750\u6599\u7684\u6c89\u79ef\u8fdb\u884c\u63a7\u5236\u3002\u5bf9\u4e8e\u65e8\u5728\u5feb\u901f\u53d1\u73b0\u65b0\u6750\u6599\u7684\u7ec4\u5408\u8584\u819c\u5408\u6210\u800c\u8a00\uff0c\u886c\u5e95\u4e0a\u7684\u975e\u5747\u5300\u6210\u5206\u5206\u5e03\u53ef\u80fd\u5177\u6709\u91cd\u8981\u610f\u4e49\u3002\u4ece\u5782\u76f4\u65b9\u5411\u4e0a\u7684\u975e\u5747\u5300\u6210\u5206\u5206\u5e03\uff0c\u4f8b\u5982\uff0c\u5bf9\u4e8e\u6539\u5584\u8584\u819c\u5728\u886c\u5e95\u4e0a\u7684\u9644\u7740\u529b\uff0c\u6216\u8005\u521b\u5efa\u8fde\u7eed\u53d8\u5316\u7684\u6298\u5c04\u7387\u53ef\u80fd\u4f1a\u5f88\u6709\u7528\u3002<\/p>\n<p id=\"NJTGsvu\"><img decoding=\"async\" loading=\"lazy\" width=\"578\" height=\"364\" class=\"alignnone size-full wp-image-247 \" src=\"https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_686755a62e9f5.png\" alt=\"\" srcset=\"https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_686755a62e9f5.png 578w, https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_686755a62e9f5-300x189.png 300w, https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_686755a62e9f5-500x315.png 500w\" sizes=\"(max-width: 578px) 100vw, 578px\" \/><\/p>\n<p>\u5408\u91d1\u4e0e\u5316\u5408\u7269\u6c89\u79ef\uff1a\u5728\u6574\u4e2a\u6210\u5206\u8303\u56f4\u5185\u63a7\u5236\u5316\u5b66\u8ba1\u91cf\u6bd4<br class=\"container-OHFynm wrapper-enlgKp undefined\" \/>\u529f\u80fd\u68af\u5ea6\u8584\u819c\uff1a\u5728\u5de5\u827a\u8fc7\u7a0b\u4e2d\u6539\u53d8\u5355\u4e2a\u6e90\u7684\u6c89\u79ef\u901f\u7387\u548c \/ \u6216\u80fd\u91cf<br class=\"container-OHFynm wrapper-enlgKp undefined\" \/>\u591a\u5c42\u6c89\u79ef\uff1a\u901a\u8fc7\u5355\u72ec\u6253\u5f00\u548c\u5173\u95ed\u6e90\u6765\u5236\u5907\u591a\u5c42\u8584\u819c<\/p>\n<p>\u7cfb\u7edf\u89c4\u683c\uff08MBS &#8211; 24\uff09<br class=\"container-OHFynm wrapper-enlgKp undefined\" \/>\u30fb50x50x50 \u5398\u7c73\u771f\u7a7a\u5ba4<br class=\"container-OHFynm wrapper-enlgKp undefined\" \/>\u30fb\u76f4\u5f84 32 \u5398\u7c73\u6e90\u73af<br class=\"container-OHFynm wrapper-enlgKp undefined\" \/>\u30fb\u591a\u8fbe 24 \u4e2a\u79bb\u5b50\u6e90\uff08\u72ec\u7acb\u5c04\u9891\u7535\u6e90\uff09<br class=\"container-OHFynm wrapper-enlgKp undefined\" \/>\u30fb\u6bcf\u4e2a\u79bb\u5b50\u6e90 0 &#8211; 500 \u5fae\u5b89<br class=\"container-OHFynm wrapper-enlgKp undefined\" \/>\u30fb5 &#8211; 10 \u5343\u4f0f\u79bb\u5b50\u675f\u80fd\u91cf<br class=\"container-OHFynm wrapper-enlgKp undefined\" \/>\u30fb\u6cb9\u51b7\uff08\u6e90\u73af\u548c\u9776\u6750\uff09<br class=\"container-OHFynm wrapper-enlgKp undefined\" \/>\u30fb\u7f57\u8328\u6cf5 15 \u7acb\u65b9\u7c73 \/ \u5c0f\u65f6\uff0c\u6da1\u8f6e\u5206\u5b50\u6cf5 700 \u5347 \/ \u79d2<br class=\"container-OHFynm wrapper-enlgKp undefined\" \/>\u30fb\u6e90\u6c14\u4f53\u5165\u53e3\uff1a\u5982\u6c29\u6c14\uff08Ar\uff09\u3001\u6c19\u6c14\uff08Xe\uff09<br class=\"container-OHFynm wrapper-enlgKp undefined\" \/>\u30fb\u5de5\u827a\u6c89\u79ef<br class=\"container-OHFynm wrapper-enlgKp undefined\" \/>\u30fb\u5b9e\u65f6\u81ea\u52a8\u675f\u6d41\u8c03\u8c10<br class=\"container-OHFynm wrapper-enlgKp undefined\" \/>\u30fb\u53ef\u5b9a\u5236\u6837\u54c1\uff08\u9876\u90e8\uff09\u88c5\u8f7d<br class=\"container-OHFynm wrapper-enlgKp undefined\" \/>\u30fb\u5728\u76f4\u5f84 10 \u5398\u7c73\uff08\u9759\u6001\uff09\u4e0a\uff0c70 \u7eb3\u7c73 \/ \u5c0f\u65f6\u7684\u5747\u5300\u6027\u4e3a \u00b12%<br class=\"container-OHFynm wrapper-enlgKp undefined\" \/>\u30fb\u591a\u8fbe 4 \u79cd\u6210\u5206\u7684\u5747\u5300\u8584\u819c<br class=\"container-OHFynm wrapper-enlgKp undefined\" \/>\u30fb\u53cd\u5e94\u6c14\u4f53\u5165\u53e3\uff1a\u5982\u6c27\u6c14\uff08O2\uff09\u3001\u6c2e\u6c14\uff08N2\uff09<br class=\"container-OHFynm wrapper-enlgKp undefined\" \/>\u30fb\u8584\u819c\u539a\u5ea6\u76d1\u6d4b<\/p>\n<p id=\"nlRDKcN\"><img decoding=\"async\" loading=\"lazy\" class=\"alignnone  wp-image-248 \" src=\"https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_686755de6d3bf.png\" alt=\"\" width=\"621\" height=\"302\" srcset=\"https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_686755de6d3bf.png 985w, https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_686755de6d3bf-300x146.png 300w, 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